Watlow Heater Catalog

Flexible Heaters

Gas Delivery and Exhaust Thermal Solutions

Watlow has the knowledge, experience and product breadth to optimize the thermal performance of your gas delivery and exhaust systems. Watlow designs and manufactures all of the thermal components to work together to enhance the performance of our customers’ wafer processing products. Incorporating thermal design of the gas systems early in the process will ensure maximum temperature uniformity, a reduction in particle buildup and minimal amount of tool downtime. We understand your system needs and can offer a customized solution to help improve tool yields. Watlow works at your pace to help you remain competitive. Watlow provides: • Cleanroom compatible heaters that cover the entire line • Heaters that fit tightly to line components, eliminating cold spots • Heaters that can be customized for uniform heating • Electronic temperature controllers and integral sensors to provide stable temperature control • Communications and software that can network with the tool or plant-wide system • ATS™ technology to simplify complex applications and reduce design iterations Watlow offers: • ASSURANT ® cloth-type heaters • Silicone rubber heaters • Molded silicone foam rubber heaters • FLUENT ® in-line heaters • Integrated sensing and control systems

Features and Benefits Moisture and chemical-resistant semiconductor- grade materials • Provides longer heater life • Ensures cleanroom compatibility Flexible heater designs • Allows thermal profile to be customized to meet specific needs • Reduces system costs Heaters fit tightly to line components • Eliminates cold spots • Provides uniform heating Integrated control systems • Provides multiple zones of control • Eliminates the need for over-temperature protection Agency approvals: UL ® , SEMI-S2 and CE • Meets necessary safety and industry regulations

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