Sensor and Controller Catalog

Temperature and Process

EZ-ZONE ® RMG The EZ-ZONE ® RMG controller with Adaptive Thermal Systems ® (ATS ™ ) technology is Watlow’s controller for gas delivery applications. This rail-mounted controller is versatile regarding mounting within a semiconductor gas chamber and provides distributed control up to 12 amps from four outputs (up to three amps per circuit). Watlow’s ATS technology provides detection of mis-wired heaters by offering a “ping” feature test system allowing users to obtain immediate feedback from soft power prior to turning on the main power. A small amount of power is applied, and the system is tested against the input data from the free software tool. If any data does not match, including ground fault detection, a fault condition occurs signaling the built-in global replay to shut down the system. This feedback prevents catastrophic conditions associated with overheated or cold spots within the gas line system. Features and Benefits Offers a combination of thermocouple inputs (up to 18 per printed circuit board assembly) and field effect transistor outputs (four three-amp outlets) • Allows users to mix and match inputs and outputs for maximum system flexibility Built-in diagnostics • Enables real-time data of line heating to master controller on tool Plug and play • Adapts directly with the EZ-ZONE RMZ EtherCAT ® module EZ-ZONE RMUH Configure this module as an ultra high-density input module for a total of 36 inputs, including limits and control loops.

Specifications Environment • Unit ambient rating -18 to 65°C, 0 to 90% RH non-condensing, IP code (IP20) EZ-ZONE RMG Card • Ambient temperature rating (electronics) -18 to 65°C • Heater current four channels at 3A, low voltage 20 to 40VDC, high voltage 85 to 336VDC EZ-ZONE RMUH Card • Ambient temperature rating (electronics) -18 to 65°C TC accuracy ± 1.0°C (pending qualification), limit relay 5A, 240VAC, RS485 standard bus, USB device Communication Protocol via EZ-ZONE RMZ • E therCAT ® ETG.5003.2060 compliant, Watlow standard bus, DeviceNET™

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